1. Liu Z., Yao X., Cheng X., Wu H., Wang H., Shen H. Experimental study on two-phase boiling in wavy copper microchannels fabricated with ultrafast laser micromachining //j. Micromech. Microeng. 2020. Vol. 30, N 065011. EDN: AZOKVH
2. Worts N., Jones J., Squier J. Surface structure modification of additively manufactured titanium components via femtosecond laser micromachining // Opt.Commun. 2019. Vol. 430. P. 352-357.
3. Gao B., Chen T., Cui W., Li C., Si J., Hou X. Processing grating structures on surfaces of wide-bandgap semiconductors using femtosecond laser and phase mask // Opt. Eng. 2015. Vol. 54, N 126106. EDN: WRVHQB
4. Roth G. L., Adelmann B., Hellmann R. Cutting and drilling of SiC semiconductor by fiber laser //j. Laser Micro Nanoeng. 2015. Vol. 10. P. 279-283.
5. Wang M., Lin J. T., Xu Y. X., Fang Z. W., Qiao L. L., Liu Z. M., Fang W., Cheng Y. Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications // Opt.Commun. 2017. Vol. 395. P. 249-260. EDN: YDHFMZ
6. Ali J. M. Y, Shanmugam V., Lim B., Aberle A. G., Mueller T. Femtosecond laser ablation of dielectric layers for high-efficiency silicon wafer solar cells // Sol. Energy. 2018. Vol. 164. P. 287-291.
7. Paun I. A., Zamfirescu M., Mihailescu M., Luculescu C. R., Mustaciosu C. C., Dorobantu I., Calenc B., Dinescu M. Laser micro-patterning of biodegradable polymer blends for tissue engineering //j. Mater. Sci. 2015. Vol. 50. P. 923-936.
8. Li Q., Perrie W., Potter R., Allegre O., Li Z., Tang Y., Zhu G., Liu D., Chalker P., Ho J. Femtosecond laser micro-structuring of amorphous Polyether (ether) ketone (PEEK) at 775 nm and 387 nm //j. Phys. D: Appl. Phys. 2020. Vol. 53, N 365301.
9. Polimeno P., Magazzu A., Iati M. A., Patti F., Saija R., Boschi C. D. E., Donato M. G., Gucciardi P. G., Jones P. H., Volpe G., Marago O. M. Optical tweezers and their applications //j. Quant Spectrosc. Radiat. Transf. 2018. Vol. 218. P. 131-150. EDN: VHIVMD
10. Gordon R. Biosensing with nanoaperture optical tweezers // Opt. Laser Technol. 2019. Vol. 109. P. 328-335. EDN: MEFEXB
11. Ji X., Mu R., Fang J., Xu S., Han L. Generation of a dark hollow beam by a four-step phase plate and its application for manipulating cold atoms // Proc. of SPEE - Quantum Optics and Applications in Computing and Communications II. 2005. Vol. 5631. P. 237-243.
12. Xia Y., Yin J. Generation of a focused hollow beam by an 2pi-phase plate and its application in atom or molecule optics //j. Opt. Soc. Am. B. 2005. Vol. 22. P. 529-536. EDN: LNLPNL
13. McKnight D. J., Vass D. G., Sillitto R. M. Development of a spatial light modulator: a randomly addressed liquid-crystal-over-nMOS array // Appl. Opt. 1989. Vol. 28. P. 4757-4762.
14. Courtial J., Dholakia K., Allen L., Padgett M. J. Gaussian beams with very high orbital angular momentum // Opt.Commun. 1997. Vol. 144. P. 210-213. EDN: AHNIXN
15. Zhou N., Liu J., Wang J. Reconfigurable and tunable twisted light laser // Sci. Rep. 2018. Vol. 8. P. 1-10. EDN: VGFUUB
16. Qu W., Gu H., Tan Q., Jin G. Precise design of two-dimensional diffractive optical elements for beam shaping // Appl. Opt. 2015. Vol. 54. P. 6521-6525.
17. Katz S., Kaplan N., Grossinger I. Using Diffractive Optical Elements: DOEs for beam shaping-fundamentals and applications // Optik & Photonik. 2018. Vol. 13. P. 83-86.
18. Mizunami T., Kawashima H., Hayashi A. A flexible fabrication technique of long-period fiber gratings using a tilted amplitude mask // Proc. of 2002 IEEE/LEOS Workshop on Fibre and Optical Passive Components (Cat. No. 02EX595). 2002. P. 92-97.
19. Zhao Q., Gong L., Li Y. M. Shaping diffraction-free Lommel beams with digital binary amplitude masks // Appl. Opt. 2015. Vol. 54. P. 7553-7558. EDN: VEIRAJ
20. Kuang Z., Li J., Edwardson S., Perrie W., Liu D., Dearden G. Ultrafast laser beam shaping for material processing at imaging plane by geometric masks using a spatial light modulator // Opt. Lasers Eng. 2015. Vol. 70. P. 1-5.
21. Li J., Kuang Z., Edwardson S., Perrie W., Liu D., Dearden G. Imaging-based amplitude laser beam shaping for material processing by 2D reflectivity tuning of a spatial light modulator // Appl. Opt. 2016. P. 1095-1100.
22. Sanner N., Huot N., Audouard E., Larat C., Huignard J., Loiseaux B. Programmable focal spot shaping of amplified femtosecond laser pulses // Opt. Lett. 2005. Vol. 30. P. 1479-1481.
23. Sanner N., Huot N., Audouard E., Larat C., Huignard J. Direct ultrafast laser microstructuring of materials using programmable beam shaping // Opt. Lasers Eng. 2007. Vol. 45. P. 737-741.
24. Liu D., Kuang Z., Shang S., Perrie W., Karnakis D., Kearsley A., Knowles M., Edwardson S., Dearden G., Watkins K. Ultrafast parallel laser processing of materials for high throughput manufacturing // Proc. of LAMP2009 - the 5th Intern. Congress on Laser Advanced Materials Processing. 2009. P. 1-5.
25. Allegre O. J., Jin Y., Perrie W., Ouyang J., Fearson E., Edwardson S., Dearden J.Complete wavefront and polarization control for ultrashort-pulse laser microprocessing // Opt. Express. 2013. Vol. 21. P. 21198-21207. EDN: RQWPKJ
26. Gerchberg R. W., Saxton W. O. A practical algorithm for the determination of the phase from image and diffraction plane pictures // Optik. 1972. Vol. 35. P. 237-246.
27. Shkuratova V. A., Kostyuk G. K., Sergeev M. M., Zakoldaev R. A., Yakovlev E. B. Speckle-free smoothing of coherence laser beams by a homogenizer on uniaxial high birefringent crystal // Opt. Mat. Express. 2019. Vol. 9. P. 2392-2399. EDN: LEFKZH
28. Shkuratova V., Kostyuk G., Sergeev M., Vikhrova E. Rapid fabrication of spiral varying retarder for using in simple schemes of generating radial and azimuthal vector optical fields // IEEE Photonics J. 2019. Vol. 11, N 2201112.
29. Shkuratova V., Rymkevich V., Kostyuk G., Sergeev M. Laser-induced microplasma as effective tool for phase Elements fabrication on amorphous and crystalline materials //j. Laser Micro Nanoeng. 2018. Vol. 13. P. 211-215. EDN: WUDOUN
30. Kostyuk G. K., Zakoldaev R. A., Sergeev M. M., Veiko V. P. Laser-induced glass surface structuring by LIBBH technology // Opt. Quantum Electron. 2016. Vol. 48, N 249. EDN: WVXJCH
31. Kostyuk G. K., Zakoldaev R. A., Koval V. V., Sergeev M. M., Rymkevich V. S. Laser microplasma as a tool to fabricate phase grating applied for laser beam splitting // Opt. Lasers Eng. 2017. Vol. 92. P. 63-69. EDN: YUVZFJ
32. Born M., Wolf E. Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light. Elsevier, 2013.
33. Dickey F. M. Laser Beam Shaping: Theory and Techniques. CRC Press, 2000.
34. ISO 13694:2000 “Optics and optical instruments - Lasers and laser-related equipment - Test methods for laser beam power (energy) density distribution” [Электронный ресурс]: (дата обращения 01.10.2021).